Multifunctional Diamond Sensor Development for Cognitive Missiles

SBIR A06-036

The thrust of this program is to perform research and development that will result in diamond sensors that can be integrated with a silicon-based integrated circuit for incorporation into the skin of cognitive missiles and other air vehicles. These sensors are fabricated on a silicon chip to allow readout of data in real time. AET has designed several sensors and Vanderbilt University has fabricated the diamond sensors on the silicon CMOS wafers.

AET and Vanderbilt University have developed a detailed process strategy for integrating diamond sensors on a standard silicon IC chip. The primary technology task that has been accomplished is the development of the specific process variables that allows the deposition of a diamond film that gives acceptable sensor characteristics and will not affect the operation of transistors and other components in the commercial silicon IC.

At least two types of sensors, temperature and radiation, have been fabricated, tested and characterized. Change of resistivity with temperature has been characterized as has the photoconductivity of the diamond sensors.